Synchronizing control of reticle and wafer stages using iterative learning control (Q2860462)
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scientific article; zbMATH DE number 6230793
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| English | Synchronizing control of reticle and wafer stages using iterative learning control |
scientific article; zbMATH DE number 6230793 |
Statements
19 November 2013
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synchronization error
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iterative learning control
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master-slave control
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reticle stage
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wafer stage
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Synchronizing control of reticle and wafer stages using iterative learning control (English)
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0.696806013584137
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0.6748470664024353
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0.6683626174926758
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0.6644611358642578
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