The surface charging effects in three-dimensional simulation of the profiles of plasma-etched nanostructures (Q2889645)
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scientific article; zbMATH DE number 6043707
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| English | The surface charging effects in three-dimensional simulation of the profiles of plasma-etched nanostructures |
scientific article; zbMATH DE number 6043707 |
Statements
The surface charging effects in three-dimensional simulation of the profiles of plasma-etched nanostructures (English)
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8 June 2012
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plasma etching
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profile charging
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finite elements method
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level set method
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0.710088312625885
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0.6774082779884338
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0.6774082779884338
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0.675324559211731
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