Regularized model of post-touchdown configurations in electrostatic MEMS: bistability analysis (Q525467)

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Regularized model of post-touchdown configurations in electrostatic MEMS: bistability analysis
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    Regularized model of post-touchdown configurations in electrostatic MEMS: bistability analysis (English)
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    4 May 2017
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    Casimir forces
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    higher order partial differential equations
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    nano-technology
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    singular perturbation techniques
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    stiction
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    van der Waals forces
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