Regularized model of post-touchdown configurations in electrostatic MEMS: bistability analysis (Q525467)
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English | Regularized model of post-touchdown configurations in electrostatic MEMS: bistability analysis |
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Regularized model of post-touchdown configurations in electrostatic MEMS: bistability analysis (English)
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4 May 2017
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Casimir forces
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higher order partial differential equations
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nano-technology
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singular perturbation techniques
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stiction
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van der Waals forces
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