Adaptive observer-based integral sliding mode control of a piezoelectric nano-manipulator (Q6598666)
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scientific article; zbMATH DE number 7907013
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| English | Adaptive observer-based integral sliding mode control of a piezoelectric nano-manipulator |
scientific article; zbMATH DE number 7907013 |
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Adaptive observer-based integral sliding mode control of a piezoelectric nano-manipulator (English)
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5 September 2024
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adaptive estimation
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observers
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robust control
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variable structure systems
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adaptive control
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piezoelectric actuators
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ultra-precision tracking
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multiaxis piezoelectric nanomanipulator
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modified Dahl model
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adaptive observer-based integral sliding mode control architecture
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good robustness
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sliding mode controller
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alleviation
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controller robustness
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PZT-actuated nanomanipulating stage
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adaptive observer-based integral sliding mode control scheme
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0.8235626816749573
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0.805618405342102
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0.7896968126296997
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