Novel electrical characterization for advanced CMOS gate dielectrics (Q954418)
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scientific article; zbMATH DE number 5363717
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| default for all languages | No label defined |
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| English | Novel electrical characterization for advanced CMOS gate dielectrics |
scientific article; zbMATH DE number 5363717 |
Statements
Novel electrical characterization for advanced CMOS gate dielectrics (English)
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10 November 2008
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MOS device
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gate dielectrics
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electrical characterization
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IETS
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PASHEI
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0.6220418810844421
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0.6153275966644287
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0.6108530163764954
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0.6097773909568787
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