Micro-three dimensional shape measurement method based on shadow Moiré using scanning electron microscopy

DOI10.1080/09500340600809285MaRDI QIDQ3430762zbMATH OpenOpenAlexFDO

Authors Yasuhiko Arai, Shunsuke Yokozeki

Publication date 23 March 2007

Published in Journal of Modern Optics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1080/09500340600809285

zbMATH Keywords

backscattered electronsdiffraction limitelectron microscopymeasurement methodMoirè topography

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Lasers, masers, optical bistability, nonlinear optics (78A60)

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