Neural network structures for optimal control of LPCVD reactors.

DOI10.1007/S005210070010MaRDI QIDQ1862958zbMATH OpenOpenAlexFDO

Authors Yanyan Li

Publication date 22 September 2003

Published in Neural Computing and Applications (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s005210070010

zbMATH Keywords

inverse modellingfilm thickness controlhybrid networks modellingLPCVD reactor

Mathematics Subject Classification ID

Learning and adaptive systems in artificial intelligence (68T05) Computing methodologies and applications (68U99)

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Cited in

(2)

• Application of the NEPSAC nonlinear predictive control strategy to a semiconductor reactor
• scientific article; zbMATH DE number 2089884 (Why is no real title available?)

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