On a three-dimensional free boundary problem modeling electrostatic MEMS

DOI10.4171/IFB/368MaRDI QIDQ345905zbMATH OpenOpenAlexFDO

Authors Philippe Laurençot, Christoph Walker

Publication date 2 December 2016

Published in Interfaces and Free Boundaries (Search for Journal in Brave)

Full work available at URL https://arxiv.org/abs/1506.00397

free boundary problem MEMS stationary solutions

Semilinear parabolic equations with Laplacian, bi-Laplacian or poly-Laplacian (35K91) Initial-boundary value problems for mixed-type systems of PDEs (35M33) PDEs in connection with mechanics of deformable solids (35Q74) Free boundary problems for PDEs (35R35) Plates (74K20)

Abstract: We consider the dynamics of an electrostatically actuated thin elastic plate being clamped at its boundary above a rigid plate. The model includes the harmonic electrostatic potential in the three-dimensional time-varying region between the plates along with a fourth-order semilinear parabolic equation for the elastic plate deflection which is coupled to the square of the gradient trace of the electrostatic potential on this plate. The strength of the coupling is tuned by a parameter

l a m b d a

proportional to the square of the applied voltage. We prove that this free boundary problem is locally well-posed in time and that for small values of

l a m b d a

solutions exist globally in time. We also derive the existence of a branch of asymptotically stable stationary solutions for small values of

l a m b d a

and non-existence of stationary solutions for large values thereof, the latter being restricted to a disc-shaped plate.

Review text

Summary: We consider the dynamics of an electrostatically actuated thin elastic plate being clamped at its boundary above a rigid plate. While the existing literature focuses so far on a two-dimensional geometry, the present model considers a three-dimensional device where the harmonic electrostatic potential varies in the three-dimensional time-dependent region between the plates. The elastic plate deflection evolves according to a fourth-order semilinear parabolic equation which is coupled to the square of the gradient trace of the electrostatic potential on this plate. The strength of the coupling is tuned by a parameter \(\lambda\) proportional to the square of the applied voltage. We prove that this free boundary problem is locally well-posed in time and that for small values of \(\lambda\) solutions exist globally in time. We also derive the existence of a branch of asymptotically stable stationary solutions for small values of \(\lambda\) and non-existence of stationary solutions for large values thereof, the latter being restricted to a disc-shaped plate.

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