The probability scheme of constructing the mathematical model of shadowed sputtering

DOI10.1016/S0010-4655(00)00036-9MaRDI QIDQ1581139zbMATH OpenOpenAlexWikidataFDO

Authors R. Smith

Publication date 14 March 2004

Published in Computer Physics Communications (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/s0010-4655(00)00036-9

zbMATH Keywords

layer functionmask functionshadowing masksputtering installation

Mathematics Subject Classification ID

Antennas, waveguides in optics and electromagnetic theory (78A50)

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