Design, identification, and control of a linear dual-stage actuation positioning system

DOI10.1016/J.JFRANKLIN.2018.05.029MaRDI QIDQ1661817zbMATHOpenAlexFDO

Authors Y. Aharonov

Publication date 17 August 2018

Published in Journal of the Franklin Institute (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.jfranklin.2018.05.029

zbMATH Keywords

identificationdesigncontrollinear dual-stage actuation positioning system

Mathematics Subject Classification ID

Sensitivity (robustness) (93B35) Variable structure systems (93B12) System identification (93B30) Design techniques (robust design, computer-aided design, etc.) (93B51) Linear systems in control theory (93C05) Automated systems (robots, etc.) in control theory (93C85)

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Cites work

• scientific article; zbMATH DE number 53595 (Why is no real title available?)
• Adaptive terminal sliding mode based thruster fault tolerant control for underwater vehicle in time-varying ocean currents
• Continuous finite-time control for robotic manipulators with terminal sliding mode
• Non-singular terminal sliding mode control of rigid manipulators
• On switching manifold design for terminal sliding mode control

Cited in

(3)

• Design of a control system for a macro-micro dual-drive high acceleration high precision positioning stage for IC packaging
• The precise modeling and active disturbance rejection control of voice coil motor in high precision motion control system
• Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning

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