Simulation and experiment based on FSMLC method with EUPI hysteresis compensation for a piezo-driven micro position stage
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Publication:2330367
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Cites work
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(5)- Observability and controllability analysis for micro-positioning stage described by sandwich model with hysteresis
- Dynamic modeling of a high-precision self-moving stage with various frictional models
- Hybrid control for piezoelectric micro positioning platform based on BP neural network and expert fuzzy control
- Linear active disturbance rejection control of piezoelectric nanopositioning stage
- Data-driven model-free predictive control for microstage with coupling and hysteresis nonlinearities
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