Simulation and experiment based on FSMLC method with EUPI hysteresis compensation for a piezo-driven micro position stage
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Publication:2330367
DOI10.1007/S11424-018-7314-6zbMATH Open1423.93074OpenAlexW2943332762MaRDI QIDQ2330367FDOQ2330367
Authors: Jinhai Gao, Lina Hao, Hongtai Cheng, Ruimin Cao, Zhiyong Sun
Publication date: 22 October 2019
Published in: Journal of Systems Science and Complexity (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s11424-018-7314-6
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Cites Work
Cited In (5)
- Hybrid control for piezoelectric micro positioning platform based on BP neural network and expert fuzzy control
- Data-driven model-free predictive control for microstage with coupling and hysteresis nonlinearities
- Observability and controllability analysis for micro-positioning stage described by sandwich model with hysteresis
- Dynamic modeling of a high-precision self-moving stage with various frictional models
- Linear active disturbance rejection control of piezoelectric nanopositioning stage
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