Simulation and experiment based on FSMLC method with EUPI hysteresis compensation for a piezo-driven micro position stage

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Publication:2330367

DOI10.1007/S11424-018-7314-6zbMATH Open1423.93074OpenAlexW2943332762MaRDI QIDQ2330367FDOQ2330367


Authors: Jinhai Gao, Lina Hao, Hongtai Cheng, Ruimin Cao, Zhiyong Sun Edit this on Wikidata


Publication date: 22 October 2019

Published in: Journal of Systems Science and Complexity (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11424-018-7314-6




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