Overview and new results in disturbance observer based adaptive vibration rejection with application to advanced manufacturing
DOI10.1002/ACS.2546zbMath1333.93137OpenAlexW1942482870MaRDI QIDQ2793966
Publication date: 17 March 2016
Published in: International Journal of Adaptive Control and Signal Processing (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1002/acs.2546
semiconductor manufacturingdisturbance observerinverse-based controladaptive vibration rejectionadvanced manufacturingnarrow-band disturbances
Production models (90B30) Adaptive control/observation systems (93C40) Vibrations in dynamical problems in solid mechanics (74H45) Observability (93B07)
Related Items (3)
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