Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times

DOI10.1016/J.COR.2014.03.024MaRDI QIDQ337294zbMATH OpenOpenAlexFDO

Authors Yan Qiao, NaiQi Wu, QingHua Zhu, LiPing Bai

Publication date 10 November 2016

Published in Computers \& Operations Research (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.cor.2014.03.024

zbMATH Keywords

schedulingsemiconductor manufacturingPetri netcluster tools

Mathematics Subject Classification ID

Deterministic scheduling theory in operations research (90B35) Production models (90B30)

Recommendations

• Performance evaluation of photolithography cluster tools
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Cites work

• A polynomial algorithm for no-wait cyclic hoist scheduling in an extended electroplating line
• A strongly polynomial algorithm for no-wait cyclic robotic flowshop scheduling
• Cyclic hoist scheduling in large real-life electroplating lines
• Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets

Cited in

(1)

• Performance evaluation of photolithography cluster tools

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