An inverse problem of charge-collection microscopy
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Publication:3739655
DOI10.1088/0266-5611/2/3/001zbMath0603.45011OpenAlexW1999967052MaRDI QIDQ3739655
Publication date: 1986
Published in: Inverse Problems (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1088/0266-5611/2/3/001
semiconductor devicedepth distributioncharge-collection microscopycharge-collection probabilityelectron generation function
Numerical methods for integral equations (65R20) Integral equations of the convolution type (Abel, Picard, Toeplitz and Wiener-Hopf type) (45E10) Motion of charged particles (78A35) Volterra integral equations (45D05) Integral equations with miscellaneous special kernels (45H05)
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