Adaptation-enhanced model-based control with charge feedback for piezo-actuated stage

DOI10.1002/ASJC.1933MaRDI QIDQ6563313zbMATH OpenWikidataFDO

Authors Yi-Liang Yeh, Jia-Yush Yen, Chi-Ju Wu

Publication date 27 June 2024

Published in Asian Journal of Control (Search for Journal in Brave)

zbMATH Keywords

piezoelectric actuatorhysteresis compensationadaptive identificationhysteresis modelcharge feedback control

Mathematics Subject Classification ID

Systems theory; control (93-XX)

Cites work

• A Lumped Parameter Electromechanical Model for Describing the Nonlinear Behavior of Piezoelectric Actuators
• Adaptive control. Algorithms, analysis and applications.
• An almost necessary and sufficient condition for robust stability of closed-loop systems with disturbance observer
• Effect of improved tracking for atomic force microscope on piezo nonlinear behavior
• Robust \(H^{\infty}\) control in fast atomic force microscopy

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