Identification of spatial defects in semiconductor manufacturing

DOI10.1002/ASMB.2615MaRDI QIDQ6579680zbMATH OpenFDO

Authors Riccardo Borgoni, Chiara Galimberti, Diego Zappa

Publication date 25 July 2024

Published in Applied Stochastic Models in Business and Industry (Search for Journal in Brave)

zbMATH Keywords

minimum spanning tree algorithmalpha-shapes\(p\)-value control chartsintegrated circuits fabrication

Mathematics Subject Classification ID

Statistics (62-XX)

Cites work

• scientific article; zbMATH DE number 1865517 (Why is no real title available?)
• Control charts for multivariate spatial autoregressive models
• Graph-Theoretical Methods for Detecting and Describing Gestalt Clusters
• Model-based clustering for integrated circuit yield enhancement
• Monitoring Wafer Map Data from Integrated Circuit Fabrication Processes for Spatially Clustered Defects
• On the shape of a set of points in the plane
• Principal Curves
• Random Graphs for Statistical Pattern Recognition
• Selection of alpha for alpha-hull in \(\mathbb{R}^ 2\)
• Statistical Analysis and Modelling of Spatial Point Patterns
• Statistics for microelectronics

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