Identification of spatial defects in semiconductor manufacturing

DOI10.1002/ASMB.2615MaRDI QIDQ6579680FDOQ6579680

Authors: Riccardo Borgoni, Chiara Galimberti, Diego Zappa 

Publication date: 25 July 2024

Published in: Applied Stochastic Models in Business and Industry (Search for Journal in Brave)

zbMATH Keywords

minimum spanning tree algorithmalpha-shapes\(p\)-value control chartsintegrated circuits fabrication

Mathematics Subject Classification ID

Statistics (62-XX)

Cites Work

• Random Graphs for Statistical Pattern Recognition
• Statistical Analysis and Modelling of Spatial Point Patterns
• Principal Curves
• Title not available (Why is that?)
• Graph-Theoretical Methods for Detecting and Describing Gestalt Clusters
• On the shape of a set of points in the plane
• Monitoring Wafer Map Data from Integrated Circuit Fabrication Processes for Spatially Clustered Defects
• Model-based clustering for integrated circuit yield enhancement
• Selection of alpha for alpha-hull in \(\mathbb{R}^ 2\)
• Control charts for multivariate spatial autoregressive models
• Statistics for microelectronics

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