Model-based clustering for integrated circuit yield enhancement
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Publication:857371
DOI10.1016/j.ejor.2005.11.032zbMath1109.90029OpenAlexW2035969035MaRDI QIDQ857371
Publication date: 14 December 2006
Published in: European Journal of Operational Research (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.ejor.2005.11.032
Stochastic models in economics (91B70) Reliability, availability, maintenance, inspection in operations research (90B25)
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Cites Work
- Unnamed Item
- Simulation of nonhomogeneous poisson processes by thinning
- Estimating the dimension of a model
- A classification EM algorithm for clustering and two stochastic versions
- A unified model incorporating yield, burn-in, and reliability
- Detecting Features in Spatial Point Processes with Clutter via Model-Based Clustering
- How Many Clusters? Which Clustering Method? Answers Via Model-Based Cluster Analysis
- Model-Based Gaussian and Non-Gaussian Clustering
- Monitoring Wafer Map Data from Integrated Circuit Fabrication Processes for Spatially Clustered Defects
- Model-Based Clustering, Discriminant Analysis, and Density Estimation
- Markov Random Fields in Pattern Recognition for Semiconductor Manufacturing
- Detecting Spatial Effects from Factorial Experiments: An Application from Integrated-Circuit Manufacturing
- Principal Curves
- An Introduction to the Theory of Point Processes
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