Singular perturbation analysis of a regularized MEMS model

DOI10.1137/18M1197552MaRDI QIDQ5383205zbMATH OpenOpenAlexWikidataFDO

Authors Annalisa Iuorio, Nikola Popović, Peter Szmolyan

Publication date 20 June 2019

Published in SIAM Journal on Applied Dynamical Systems (Search for Journal in Brave)

Full work available at URL https://arxiv.org/abs/1807.02069

zbMATH Keywords

bifurcation diagramblow-up methodboundary value problemgeometric singular perturbation theorymicro-electro mechanical systemstouchdown

Mathematics Subject Classification ID

Singular nonlinear boundary value problems for ordinary differential equations (34B16) Bifurcation theory for ordinary differential equations (34C23) Asymptotic expansions of solutions to ordinary differential equations (34E05) Singular perturbations for ordinary differential equations (34E15) Singular perturbations in context of PDEs (35B25) Singular parabolic equations (35K67)

Abstract: Micro-Electro Mechanical Systems (MEMS) are defined as very small structures that combine electrical and mechanical components on a common substrate. Here, the electrostatic-elastic case is considered, where an elastic membrane is allowed to deflect above a ground plate under the action of an electric potential, whose strength is proportional to a parameter $lambda$. Such devices are commonly described by a parabolic partial differential equation that contains a singular nonlinear source term. The singularity in that term corresponds to the so-called "touchdown" phenomenon, where the membrane establishes contact with the ground plate. Touchdown is known to imply the non-existence of steady state solutions and blow-up of solutions in finite time. We study a recently proposed extension of that canonical model, where such singularities are avoided due to the introduction of a regularizing term involving a small "regularization" parameter $varepsilon$. Methods from dynamical systems and geometric singular perturbation theory, in particular the desingularization technique known as "blow-up", allow for a precise description of steady-state solutions of the regularized model, as well as for a detailed resolution of the resulting bifurcation diagram. The interplay between the two main model parameters $varepsilon$ and $lambda$ is emphasized; in particular, the focus is on the singular limit as both parameters tend to zero.

Recommendations

• Regularized model of post-touchdown configurations in electrostatic MEMS: equilibrium analysis
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• Analysis of the Dynamics and Touchdown in a Model of Electrostatic MEMS

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Cited in

(21)

• Analysis of microelectromechanical systems (MEMS) devices by the meshless point weighted least-squares method
• Asymptotics of some nonlinear eigenvalue problems for a MEMS capacitor: Part I: Fold point asymptotics
• Symmetry analysis of a canonical MEMS model
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