Electrostatic field in terms of geometric curvature in membrane MEMS devices (Q2364834)
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English | Electrostatic field in terms of geometric curvature in membrane MEMS devices |
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Electrostatic field in terms of geometric curvature in membrane MEMS devices (English)
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25 July 2017
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In this paper, the authors discuss the problem of existence and uniqueness of solutions related to the membrane deformation for electrostatic actuation in the steady state case under a framework of 1D-membrane Micro-Electro-Mechanical-Systems (MEMS) theory. They propose a new model in which the electric field magnitude E is proportional to the curvature of the membrane. For the existence of solution of the differential equation, the Schauder-Tychonoff fixed point theory is employed. Sufficient conditions are obtained for the uniqueness of the solution. In the absence of the explicit solution, a numerical method is developed to study the implicit solution. Some numerical tests are carried out to support the analytical results obtained.
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MEMS
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NEMS
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electrostatic actuation
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boundary semi-linear elliptic problems
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Green function
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fixed-point theorem
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