Multi-layer thin films/substrate system subjected to non-uniform misfit strains (Q837355): Difference between revisions

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Latest revision as of 23:40, 1 July 2024

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Multi-layer thin films/substrate system subjected to non-uniform misfit strains
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    Multi-layer thin films/substrate system subjected to non-uniform misfit strains (English)
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    10 September 2009
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    multi-layer thin films
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    non-uniform misfit strain
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    non-uniform wafer curvatures
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    non-local stress-curvature relations
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    interfacial shears
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