Multi-layer thin films/substrate system subjected to non-uniform misfit strains

DOI10.1016/J.IJSOLSTR.2007.09.012MaRDI QIDQ837355zbMATH OpenOpenAlexFDO

Authors N. E. Zubov

Publication date 10 September 2009

Published in International Journal of Solids and Structures (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.ijsolstr.2007.09.012

zbMATH Keywords

interfacial shearsnon-uniform misfit strainnon-uniform wafer curvaturesmulti-layer thin filmsnon-local stress-curvature relations

Mathematics Subject Classification ID

Thin films (74K35)

Recommendations

• Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. I: Analysis for obtaining film stress from non-local curvature information
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Cites work

• Bifurcation in isotropic thin film/substrate plates
• Extension of Stoney's formula to non-uniform temperature distributions in thin film/substrate systems. The case of radial symmetry
• Geometrically nonlinear stress-deflection relations for thin film/substrate systems
• Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures
• Substrate curvature due to thin film mismatch strain in the nonlinear deformation range
• Thermoelastic analysis of periodic thin lines deposited on a substrate
• Thin Film Materials
• Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. I: Analysis for obtaining film stress from non-local curvature information
• Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. II: Experimental validation of the non-local stress/curvature relations

Cited in

(12)

• The role of the sample shape and size on the internal stress induced curvature of thin-film substrate systems
• Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. II: Experimental validation of the non-local stress/curvature relations
• Analytical solutions of film/substrate structure with film bending under elastic boundary and bifurcation deformation analysis
• Analytical solutions of electroelastic fields in piezoelectric thin-film multilayer: applications to piezoelectric sensors and actuators
• Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures
• Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. I: Analysis for obtaining film stress from non-local curvature information
• Programmable spiral and helical deformation behaviors of hydrogel-based bi-material beam structures
• Extension of Stoney's formula to non-uniform temperature distributions in thin film/substrate systems. The case of radial symmetry
• Thin Film Materials
• Elastic thermal stresses in a circular overlay/rigid substrate system
• Fracture saturation and critical thickness in layered materials
• Residual stresses in silicon-on-sapphire thin film systems

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