Multi-layer thin films/substrate system subjected to non-uniform misfit strains

DOI10.1016/J.IJSOLSTR.2007.09.012MaRDI QIDQ837355zbMATHOpenAlexFDO

Authors N. E. Zubov

Publication date 10 September 2009

Published in International Journal of Solids and Structures (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.ijsolstr.2007.09.012

zbMATH Keywords

interfacial shearsnon-uniform misfit strainnon-uniform wafer curvaturesmulti-layer thin filmsnon-local stress-curvature relations

Mathematics Subject Classification ID

Thin films (74K35)

Recommendations

• Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. I: Analysis for obtaining film stress from non-local curvature information
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• Geometrically nonlinear stress-deflection relations for thin film/substrate systems

Cites work

• Bifurcation in isotropic thin film/substrate plates
• Extension of Stoney's formula to non-uniform temperature distributions in thin film/substrate systems. The case of radial symmetry
• Geometrically nonlinear stress-deflection relations for thin film/substrate systems
• Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures
• Substrate curvature due to thin film mismatch strain in the nonlinear deformation range
• Thermoelastic analysis of periodic thin lines deposited on a substrate
• Thin Film Materials
• Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. I: Analysis for obtaining film stress from non-local curvature information
• Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. II: Experimental validation of the non-local stress/curvature relations

Cited in

(11)

• Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. II: Experimental validation of the non-local stress/curvature relations
• Residual stresses in silicon-on-sapphire thin film systems
• The role of the sample shape and size on the internal stress induced curvature of thin-film substrate systems
• Programmable spiral and helical deformation behaviors of hydrogel-based bi-material beam structures
• Thin Film Materials
• Elastic thermal stresses in a circular overlay/rigid substrate system
• Extension of Stoney's formula to non-uniform temperature distributions in thin film/substrate systems. The case of radial symmetry
• Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures
• Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. I: Analysis for obtaining film stress from non-local curvature information
• Analytical solutions of electroelastic fields in piezoelectric thin-film multilayer: applications to piezoelectric sensors and actuators
• Fracture saturation and critical thickness in layered materials

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