A free boundary problem modeling electrostatic MEMS. II: Nonlinear bending effects

DOI10.1142/S0218202514500298MaRDI QIDQ2930093arXivFDO

Authors Philippe Laurençot, Christoph Walker

Publication date 18 November 2014

Published in M\(^3\)AS. Mathematical Models \& Methods in Applied Sciences (Search for Journal in Brave)

Full work available at URL https://arxiv.org/abs/1309.3726

zbMATH Keywords

curvatureelectrostatic microelectromechanical systemsfree boundary problemnonlinear bending effectswell-posedness

Mathematics Subject Classification ID

Quasilinear parabolic equations with mean curvature operator (35K93) Initial-boundary value problems for mixed-type systems of PDEs (35M33) PDEs in connection with mechanics of deformable solids (35Q74) Free boundary problems for PDEs (35R35) One-parameter semigroups and linear evolution equations (47D06) Control, switches and devices (``smart materials) in solid mechanics (74M05)

Abstract: Well-posedness of a free boundary problem for electrostatic microelectromechanical systems (MEMS) is investigated when nonlinear bending effects are taken into account. The model describes the evolution of the deflection of an electrically conductive elastic membrane suspended above a fixed ground plate together with the electrostatic potential in the free domain between the membrane and the fixed ground plate. The electrostatic potential is harmonic in that domain and its values are held fixed along the membrane and the ground plate. The equation for the membrane deflection is a parabolic quasilinear fourth-order equation, which is coupled to the gradient trace of the electrostatic potential on the membrane.

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Cited in

(20)

• Moving mesh simulation of contact sets in two dimensional models of elastic-electrostatic deflection problems
• On a free boundary model for three-dimensional MEMS with a hinged top plate. II: Parabolic case
• Qualitative analysis of a curvature equation modelling MEMS with vertical loads
• Mathematical modelling and analysis of temperature effects in MEMS
• On a free boundary model for three-dimensional MEMS with a hinged top plate: stationary case
• A new model for electrostatic MEMS with two free boundaries
• The abstract quasilinear Cauchy problem for a MEMS model with two free boundaries
• A parabolic free boundary problem modeling electrostatic MEMS
• On qualitative properties of solutions to microelectromechanical systems with general permittivity
• A variational approach to a stationary free boundary problem modeling MEMS
• Regularized model of post-touchdown configurations in electrostatic MEMS: equilibrium analysis
• A fourth-order model for MEMS with clamped boundary conditions
• Analysis of nonlinear electrostatic membranes
• The time singular limit for a fourth-order damped wave equation for MEMS
• Heterogeneous dielectric properties in models for microelectromechanical systems
• A free boundary problem modeling electrostatic MEMS: I. Linear bending effects
• Some singular equations modeling MEMS
• A survey on second order free boundary value problems modelling MEMS with general permittivity profile
• Nonlinear non-local elliptic equation modelling electrostatic actuation
• A free boundary value problem modelling microelectromechanical systems with general permittivity

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