A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3D nanopositioning example (Q445055)
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scientific article; zbMATH DE number 6071686
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| English | A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3D nanopositioning example |
scientific article; zbMATH DE number 6071686 |
Statements
A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3D nanopositioning example (English)
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24 August 2012
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iterative learning control
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system inversion
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dynamics coupling
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nanopositioning control
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0.83367145
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0.83137107
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0.82711923
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0.8128462
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0.81208444
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0.81145674
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0.8102226
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