A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3D nanopositioning example (Q445055)
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English | A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3D nanopositioning example |
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A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3D nanopositioning example (English)
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24 August 2012
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iterative learning control
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system inversion
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dynamics coupling
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nanopositioning control
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