A nonlinear control strategy for robust tracking under exogenous vibrations for in-line nano-metrology (Q2662264)
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scientific article; zbMATH DE number 7332314
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| English | A nonlinear control strategy for robust tracking under exogenous vibrations for in-line nano-metrology |
scientific article; zbMATH DE number 7332314 |
Statements
A nonlinear control strategy for robust tracking under exogenous vibrations for in-line nano-metrology (English)
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12 April 2021
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robust tracking
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exogenous vibrations
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nonlinear control
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learning observer
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error feedback
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0.6900551915168762
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0.6857839822769165
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0.6812770366668701
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0.6795487999916077
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