A nonlinear control strategy for robust tracking under exogenous vibrations for in-line nano-metrology (Q2662264)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A nonlinear control strategy for robust tracking under exogenous vibrations for in-line nano-metrology |
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A nonlinear control strategy for robust tracking under exogenous vibrations for in-line nano-metrology (English)
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12 April 2021
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robust tracking
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exogenous vibrations
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nonlinear control
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learning observer
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error feedback
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