A nonlinear control strategy for robust tracking under exogenous vibrations for in-line nano-metrology

DOI10.1016/J.AUTOMATICA.2020.109302MaRDI QIDQ2662264zbMATH OpenOpenAlexFDO

Authors Saverio Messineo

Publication date 12 April 2021

Published in Automatica (Search for Journal in Brave)

Copyright license Creative Commons Attribution 4.0 International

Full work available at URL https://doi.org/10.1016/j.automatica.2020.109302

zbMATH Keywords

error feedbackexogenous vibrationslearning observernonlinear controlrobust tracking

Mathematics Subject Classification ID

Feedback control (93B52) Observers (93B53) Nonlinear systems in control theory (93C10)

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Cites work

• A Continuous Asymptotic Tracking Control Strategy for Uncertain Nonlinear Systems
• Nonlinear systems.
• Output feedback stabilization of fully linearizable systems
• Simple adaptive asymptotic tracking scheme for parametric strict-feedback nonlinear systems with additive disturbance

Cited in

(3)

• Robust tracking control of an array of nanoparticles moving on a substrate
• A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3D nanopositioning example
• A robust state-feedback control approach for a class of uncertain non-linear systems

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