A nonlinear control strategy for robust tracking under exogenous vibrations for in-line nano-metrology
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Publication:2662264
DOI10.1016/j.automatica.2020.109302zbMath1461.93161OpenAlexW3094334891MaRDI QIDQ2662264
Publication date: 12 April 2021
Published in: Automatica (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.automatica.2020.109302
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