Identifiability of Semiconductor Defects from LBIC Images
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Publication:4037669
DOI10.1137/0152093zbMATH Open0766.35075OpenAlexW1979257737MaRDI QIDQ4037669FDOQ4037669
Authors: W. Fang, Kazufumi Ito 
Publication date: 16 May 1993
Published in: SIAM Journal on Applied Mathematics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1137/0152093
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Cited In (11)
- Second-order approach to optimal semiconductor design
- LBIC imaging of semiconductor arrays: the cross-sectional model
- On the stationary semiconductor equations arising in modeling an LBIC technique
- A nondestructive technique to identify and localize microscopic defects on a microstrip line
- The quasi-neutral limit in optimal semiconductor design
- A homogenization model for laser beam-induced current imaging and detection of non-uniform\-ities in semiconductor arrays
- Parameter Identification for Semiconductor Diodes by LBIC Imaging
- Defect detection in patterned wafers using multichannel scanning electron microscope
- Explicit solutions for LBIC signals in semiconductors by asymptotic method
- AN OPTIMAL CONTROL APPROACH TO SEMICONDUCTOR DESIGN
- Risk-averse optimal control of semilinear elliptic PDEs
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