Application and Reliability of Change-Point Analyses for Detecting a Defective Stage in Integrated Circuit Manufacturing

DOI10.1080/03610910600591602MaRDI QIDQ5481633zbMATHOpenAlexFDO

Authors

Publication date 10 August 2006

Published in Communications in Statistics. Simulation and Computation (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1080/03610910600591602

zbMATH Keywords

Markov chain Monte Carloquality controlchange-point analysisbaggingoptimal segmentation

Mathematics Subject Classification ID

Applications of Markov chains and discrete-time Markov processes on general state spaces (social mobility, learning theory, industrial processes, etc.) (60J20) Bayesian inference (62F15) Applications of statistics in engineering and industry; control charts (62P30) Numerical analysis or methods applied to Markov chains (65C40) Signal detection and filtering (aspects of stochastic processes) (60G35)

Recommendations

• Utilizing simulation to develop economic equipment selection and sampling plans for integrated circuit manufacturing
• A review of yield modelling techniques for semiconductor manufacturing
• Monitoring Wafer Map Data from Integrated Circuit Fabrication Processes for Spatially Clustered Defects
• Detection of an unreliable element in a flexible manufacturing system
• scientific article; zbMATH DE number 872143

Cites work

• scientific article; zbMATH DE number 3860199 (Why is no real title available?)
• scientific article; zbMATH DE number 44579 (Why is no real title available?)
• Automatic Bayesian Curve Fitting
• Monte Carlo sampling methods using Markov chains and their applications
• Reversible jump Markov chain Monte Carlo computation and Bayesian model determination
• Using penalized contrasts for the change-point problem

Cited in

(2)

• Imperfect debugging study of SRGM with fault reduction factor and multiple change point
• scientific article; zbMATH DE number 7070738 (Why is no real title available?)

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