A multi-criteria approach for scheduling semiconductor wafer fabrication facilities
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Publication:835581
DOI10.1007/S10951-007-0049-1zbMATH Open1168.90465OpenAlexW2014965742MaRDI QIDQ835581FDOQ835581
Authors: Michele E. Pfund, Hari Balasubramanian, John Fowler, Scott J. Mason, Oliver Rose 
Publication date: 28 August 2009
Published in: Journal of Scheduling (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s10951-007-0049-1
Recommendations
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Cites Work
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- Title not available (Why is that?)
- Title not available (Why is that?)
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Cited In (21)
- A new paradigm for rule-based scheduling in the wafer probe centre
- Scheduling of bottleneck workstation in wafer fabrication systems based on an improved multi-objective particle swarm optimization algorithm
- Combined scheduling criteria approach for semiconductor wafer fabrication system based on fuzzy cognitive maps
- Job order releasing and throughput planning for multi-priority orders in wafer fabs
- Modelling and analysis of wafer fabrication scheduling via generalized stochastic Petri net and simulated annealing
- Scheduling of multiple in-line steppers for semiconductor wafer fabs
- Configuration and the advantages of the shifting bottleneck procedure for optimizing the job shop total weighted tardiness scheduling problem
- The wafer probing scheduling problem (WPSP)
- A memetic algorithm for minimizing total weighted tardiness on parallel batch machines with incompatible job families and dynamic job arrival
- Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots
- Enhancing the long-term yield competitiveness of a semiconductor manufacturing factory using a multiobjective fuzzy nonlinear programming approach
- Scheduling algorithms for a semiconductor probing facility
- A FUZZY-NEURAL FLUCTUATION SMOOTHING RULE FOR SCHEDULING JOBS WITH VARIOUS PRIORITIES IN A SEMICONDUCTOR MANUFACTURING FACTORY
- Multiple response optimization using mixture-designed experiments and desirability functions in semiconductor scheduling
- Allocation of Chips to Wafers in a Production Problem of Semiconductor Kits
- A survey of scheduling with parallel batch (p-batch) processing
- Rule-based scheduling in wafer fabrication with due date-based objectives
- Dynamic state-dependent dispatching for wafer fabrication
- Hybrid ASP-based multi-objective scheduling of semiconductor manufacturing processes
- Dynamic supply chain scheduling
- Modelling and rescheduling of a re-entrant wafer fabrication line involving machine unreliability
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