Multi-layer thin films/substrate system subjected to non-uniform misfit strains

DOI10.1016/J.IJSOLSTR.2007.09.012zbMath1169.74480OpenAlexW1974322413MaRDI QIDQ837355

N. E. Zubov

Publication date: 10 September 2009

Published in: International Journal of Solids and Structures (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.ijsolstr.2007.09.012

zbMATH Keywords

interfacial shearsnon-uniform misfit strainnon-uniform wafer curvaturesmulti-layer thin filmsnon-local stress-curvature relations

Mathematics Subject Classification ID

Thin films (74K35)

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Cites Work

• Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures
• Bifurcation in isotropic thin film/substrate plates
• Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. I: Analysis for obtaining film stress from non-local curvature information
• Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. II: Experimental validation of the non-local stress/curvature relations
• Extension of Stoney's formula to non-uniform temperature distributions in thin film/substrate systems. The case of radial symmetry
• Thermoelastic analysis of periodic thin lines deposited on a substrate
• Substrate curvature due to thin film mismatch strain in the nonlinear deformation range
• Geometrically nonlinear stress-deflection relations for thin film/substrate systems
• Thin Film Materials

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