Tool capacity planning for semiconductor fabrication facilities under demand uncertainty
DOI10.1016/S0377-2217(98)00389-0zbMATH Open0985.90030OpenAlexW2015253360MaRDI QIDQ1579490FDOQ1579490
Authors: Jayashankar M. Swaminathan 
Publication date: 3 June 2002
Published in: European Journal of Operational Research (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/s0377-2217(98)00389-0
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Cites Work
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- On a Multi-stage Stochastic Programming Model for Inventory Planning
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- Tool capacity planning in semiconductor manufacturing.
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