A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3D nanopositioning example

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Publication:445055

DOI10.1016/j.automatica.2011.09.032zbMath1244.93062OpenAlexW2027071034MaRDI QIDQ445055

Haiming Wang, Qingze Zou, Yan Yan

Publication date: 24 August 2012

Published in: Automatica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.automatica.2011.09.032




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