Feedforward control of piezoactuators in atomic force microscope systems
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Publication:5375685
Cited in
(16)- Accounting for hysteresis in repetitive control design: nanopositioning example
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- Characterization, modeling and \(H_\infty\) control of \(n\)-DOF piezoelectric actuators: application to a 3-DOF precise positioner
- A fast non-singular terminal sliding mode control based on perturbation estimation for piezoelectric actuators systems
- Asymptotic tracking control of uncertain nonlinear systems with unknown actuator nonlinearity and unknown gain signs
- <scp>SVD</scp>‐Based Accurate Identification and Compensation of the Coupling Hysteresis and Creep Dynamics in Piezoelectric Actuators
- An incremental Hammerstein-like modeling approach for the decoupled creep, vibration and hysteresis dynamics of piezoelectric actuator
- Advanced control of piezoelectric micro-/nano-positioning systems
- Correcting devices of control systems for deformation of multilayered piezodrives of nano- and micrometric movements
- Mechanical and control characteristics of multilayered piezodrives of nano- and micrometric movements for parallel and coded control
- Dynamic inversion-based hysteresis compensation using extended high-gain observer
- Adaptive trajectory control of microcantilever's tip utilised in atomic force microscopy-based manipulation
- Why are some hysteresis loops shaped like a butterfly?
- Adaptive PI-based sliding mode control for nanopositioning of piezoelectric actuators
- Finite-time terminal sliding mode tracking control for piezoelectric actuators
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