Feedforward control of piezoactuators in atomic force microscope systems
From MaRDI portal
Publication:5375685
DOI10.1109/MCS.2008.930922zbMath1395.93231OpenAlexW2101544107MaRDI QIDQ5375685
Santosh Devasia, Kam K. Leang, Qingze Zou
Publication date: 14 September 2018
Published in: IEEE Control Systems (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1109/mcs.2008.930922
Control, switches and devices (``smart materials) in solid mechanics (74M05) Feedback control (93B52)
Related Items (12)
An incremental Hammerstein-like modeling approach for the decoupled creep, vibration and hysteresis dynamics of piezoelectric actuator ⋮ Accounting for hysteresis in repetitive control design: nanopositioning example ⋮ Asymptotic tracking control of uncertain nonlinear systems with unknown actuator nonlinearity and unknown gain signs ⋮ Fixed-time adaptive fuzzy control scheme with prescribed tracking accuracy for uncertain nonlinear hysteretic systems ⋮ A fast non-singular terminal sliding mode control based on perturbation estimation for piezoelectric actuators systems ⋮ Iterative tuning of feedforward controller with precise time-delay compensation for precision motion system ⋮ Adaptive PI-based sliding mode control for nanopositioning of piezoelectric actuators ⋮ Finite-time terminal sliding mode tracking control for piezoelectric actuators ⋮ Why are some hysteresis loops shaped like a butterfly? ⋮ <scp>SVD</scp>‐Based Accurate Identification and Compensation of the Coupling Hysteresis and Creep Dynamics in Piezoelectric Actuators ⋮ Characterization, Modeling andH∞control ofn-DOF Piezoelectric Actuators: application to A 3-DOF Precise Positioner ⋮ Dynamic inversion-based hysteresis compensation using extended high-gain observer
This page was built for publication: Feedforward control of piezoactuators in atomic force microscope systems