Feedforward control of piezoactuators in atomic force microscope systems

DOI10.1109/MCS.2008.930922zbMATH Open1395.93231OpenAlexW2101544107MaRDI QIDQ5375685FDOQ5375685

Authors: Kam K. Leang, Qingze Zou, Santosh Devasia 

Publication date: 14 September 2018

Published in: IEEE Control Systems (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1109/mcs.2008.930922

Mathematics Subject Classification ID

Feedback control (93B52) Control, switches and devices (``smart materials) in solid mechanics (74M05)

Cited In (16)

• Iterative tuning of feedforward controller with precise time-delay compensation for precision motion system
• Fixed-time adaptive fuzzy control scheme with prescribed tracking accuracy for uncertain nonlinear hysteretic systems
• Characterization, modeling and \(H_\infty\) control of \(n\)-DOF piezoelectric actuators: application to a 3-DOF precise positioner
• A fast non-singular terminal sliding mode control based on perturbation estimation for piezoelectric actuators systems
• <scp>SVD</scp>‐Based Accurate Identification and Compensation of the Coupling Hysteresis and Creep Dynamics in Piezoelectric Actuators
• Asymptotic tracking control of uncertain nonlinear systems with unknown actuator nonlinearity and unknown gain signs
• An incremental Hammerstein-like modeling approach for the decoupled creep, vibration and hysteresis dynamics of piezoelectric actuator
• Advanced control of piezoelectric micro-/nano-positioning systems
• Correcting devices of control systems for deformation of multilayered piezodrives of nano- and micrometric movements
• Mechanical and control characteristics of multilayered piezodrives of nano- and micrometric movements for parallel and coded control
• Dynamic inversion-based hysteresis compensation using extended high-gain observer
• Adaptive trajectory control of microcantilever's tip utilised in atomic force microscopy-based manipulation
• Why are some hysteresis loops shaped like a butterfly?
• Adaptive PI-based sliding mode control for nanopositioning of piezoelectric actuators
• Finite-time terminal sliding mode tracking control for piezoelectric actuators
• Accounting for hysteresis in repetitive control design: nanopositioning example

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