Optimal estimation of rational feedforward control via instrumental variables: with application to a wafer stage

DOI10.1002/ASJC.1595zbMATH Open1398.93320OpenAlexW2753476128MaRDI QIDQ4686302FDOQ4686302

Authors: Frank Boeren, Lennart Blanken, Dennis Bruijnen, Tom Oomen 

Publication date: 10 October 2018

Published in: Asian Journal of Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/asjc.1595

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zbMATH Keywords

mechatronicsfeedforward controllearning control

Mathematics Subject Classification ID

Learning and adaptive systems in artificial intelligence (68T05) Application models in control theory (93C95) Estimation and detection in stochastic control theory (93E10) Software, source code, etc. for problems pertaining to systems and control theory (93-04)

Cited In (4)

• Iterative tuning of feedforward controller with precise time-delay compensation for precision motion system
• Design of a run-to-run controller based on discrete sliding-mode observer
• Title not available (Why is that?)
• Optimal iterative feedforward parameter tuning for varying trajectory under actuator constraints

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